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DIFFUSION FURNACE
Tecnofimes has completely change the concept of diffusion furnace passing from a metallic belt transport to a ceramic rolls transport. The new concept permit to have a better productivity, no metallic contamination, minimize electrical power consumption use the same furnace to produce all the different sizes of wafers and reducing the maintenance costs.
Tecnofimes is able to produce diffusion furnaces to treat large wafer dimension and assure the Cmer productivity request.
This furnace it's a really continuous equipment and automatic loading and unloading equipment could be installed to reduce manpower costs.
Main advantages are:
- Very fast and uniform temperature formulation
- No loss of heat outside
- Silicon wafers free of metallic contamination
- Uniform and high productivity
- Long working life of ceramic components
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Tecnofimes Srl - Member of R&R Group
Piazza Podgora, 2 - 20052 Monza (Milano) Italy
Tel.: (+39) 039.21.40.199 - Fax: (+39) 039.21.21.431 www.tecnofimes.com - info@tecnofimes.com
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